Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9650302 | Method for producing electrostatic chuck and electrostatic chuck | Takahiro Takahashi, Hirokazu Nakanishi | 2017-05-16 |
| 9630380 | Method for manufacturing alumina sintered body and alumina sintered body | Kazuhiro Nobori | 2017-04-25 |
| 9533920 | Ceramic heater and method for producing the same | Kazuhiro Nobori, Hidemi Nakagawa | 2017-01-03 |