Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673282 | Handle substrates of composite substrates for semiconductors, and composite substrates for semiconductors | Sugio Miyazawa, Yasunori Iwasaki, Tatsuro Takagaki, Akiyoshi Ide | 2017-06-06 |
| 9650302 | Method for producing electrostatic chuck and electrostatic chuck | Takuji Kimura, Takahiro Takahashi | 2017-05-16 |
| 9538653 | Insulating substrates including through holes | Tatsuro Takagaki, Yasunori Iwasaki, Sugio Miyazawa, Akiyoshi Ide | 2017-01-03 |