Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9764942 | Multi-level micromechanical structure | Antti Iihola, Altti Torkkeli, Matti LIUKKU | 2017-09-19 |
| 9651574 | Acceleration sensor structure and use thereof | Leif Roschier, Anssi Blomqvist | 2017-05-16 |
| 9575088 | Capacitive micromechanical acceleration sensor | Matti LIUKKU, Anssi Blomqvist | 2017-02-21 |
| 9547020 | Capacitive micromechanical sensor structure and micromechanical accelerometer | Matti LIUKKU | 2017-01-17 |