Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9764942 | Multi-level micromechanical structure | Antti Iihola, Ville-Pekka RYTKÖNEN, Matti LIUKKU | 2017-09-19 |
| 9556021 | Method of manufacturing a MEMS structure and use of the method | — | 2017-01-31 |