Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778578 | Low contact imprint lithography template chuck system for improved overlay correction | Anshuman Cherala, Byung-Jin Choi, Seth J. Bamesberger | 2017-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778578 | Low contact imprint lithography template chuck system for improved overlay correction | Anshuman Cherala, Byung-Jin Choi, Seth J. Bamesberger | 2017-10-03 |