Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778562 | Porous template and imprinting stack for nano-imprint lithography | Frank Y. Xu, Weijun Liu, Edward Brian Fletcher, Sidlgata V. Sreenivasan, Byung-Jin Choi +2 more | 2017-10-03 |
| 9778578 | Low contact imprint lithography template chuck system for improved overlay correction | Mario Johannes Meissl, Byung-Jin Choi, Seth J. Bamesberger | 2017-10-03 |