Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828355 | Compound, material for forming underlayer film for lithography, underlayer film for lithography and pattern forming method | Masatoshi Echigo, Takashi MAKINOSHIMA | 2017-11-28 |
| 9809601 | Compound, material for forming underlayer film for lithography, underlayer film for lithography and pattern forming method | Masatoshi Echigo, Takashi MAKINOSHIMA | 2017-11-07 |