Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9840568 | Polymer and method for producing same | Atsushi Yasuda | 2017-12-12 |
| 9733564 | Copolymers for lithography and method for producing same, resist composition, method for producing substrate with pattern formed thereupon, method for evaluating copolymers, and method for analyzing copolymer compositions | Atsushi Yasuda, Hikaru Momose | 2017-08-15 |