Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9840568 | Polymer and method for producing same | Tomoya Oshikiri | 2017-12-12 |
| 9823563 | Alcohol compound and method for producing same, method for producing lactone compound, (meth)acrylate ester and method for producing same, polymer and method for producing same, and resist composition and method for producing substrate using same | Satoshi Sakuma, Masashi Serizawa, Nobuhisa Yada, Shinichi Maeda | 2017-11-21 |
| 9733564 | Copolymers for lithography and method for producing same, resist composition, method for producing substrate with pattern formed thereupon, method for evaluating copolymers, and method for analyzing copolymer compositions | Tomoya Oshikiri, Hikaru Momose | 2017-08-15 |
| 9682746 | Snowmobile | Kotaro Ogura | 2017-06-20 |
| 9540468 | Resist copolymer and resist composition | Keisuke Kato, Ryuichi Ansai, Shinichi Maeda | 2017-01-10 |