Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799545 | Electrostatic chuck and method of manufacturing electrostatic chuck | Ryo Yamasaki, Mitsuharu Inaba | 2017-10-24 |
| 9544480 | Gimbal device and control method of gimbal device | Hidehiro Katoh, Kazuhiko Kobayashi, Kazuyuki Takao, Teppei Kubota, Itsuki Kato | 2017-01-10 |