Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799545 | Electrostatic chuck and method of manufacturing electrostatic chuck | Ryo Yamasaki, Kensuke Taguchi | 2017-10-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799545 | Electrostatic chuck and method of manufacturing electrostatic chuck | Ryo Yamasaki, Kensuke Taguchi | 2017-10-24 |