Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847262 | Method and apparatus for real-time monitoring of plasma etch uniformity | Jean-Francois de Marneffe | 2017-12-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847262 | Method and apparatus for real-time monitoring of plasma etch uniformity | Jean-Francois de Marneffe | 2017-12-19 |