Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847262 | Method and apparatus for real-time monitoring of plasma etch uniformity | Vladimir Samara | 2017-12-19 |
| 9595422 | Plasma etching of porous substrates | Mikhail Baklanov, Liping Zhang | 2017-03-14 |