Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9702268 | Device for controlling a working fluid in a closed circuit operating according to the Rankine cycle, and method using said device | Pascal Smague, Pierre Leduc | 2017-07-11 |
| 9585236 | Sn vapor EUV LLP source system for EUV lithography | Natale M. Ceglio, Daniel Stearns | 2017-02-28 |