Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9609731 | Systems and methods for synchronous operation of debris-mitigation devices | Raymond Merrill, Jr., Daniel Stearns | 2017-03-28 |
| 9585236 | Sn vapor EUV LLP source system for EUV lithography | Daniel Stearns, Richard Levesque | 2017-02-28 |