SS

Stephen M. Sirard

Lam Research: 2 patents #78 of 396Top 20%
🗺 Texas: #1,514 of 15,389 inventorsTop 10%
Overall (2017): #58,656 of 506,227Top 15%
3
Patents 2017

Issued Patents 2017

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
9773649 Dry development and image transfer of si-containing self-assembled block copolymers 2017-09-26
9673037 Substrate freeze dry apparatus and method Diane Hymes, Alan M. Schoepp 2017-06-06
9666427 Method of collapse-free drying of high aspect ratio structures Diane Hymes, Olivier Postel 2017-05-30