Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673037 | Substrate freeze dry apparatus and method | Stephen M. Sirard, Alan M. Schoepp | 2017-06-06 |
| 9666427 | Method of collapse-free drying of high aspect ratio structures | Stephen M. Sirard, Olivier Postel | 2017-05-30 |
| 9627608 | Dielectric repair for emerging memory devices | Nerissa Draeger, Thorsten Lill | 2017-04-18 |