Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816944 | Method for evaluating oxide semiconductor thin film, method for managing quality of oxide semiconductor thin film, and evaluation element and evaluation device used in above evaluation method | Kazushi Hayashi, Aya Miki, Toshihiro Kugimiya | 2017-11-14 |
| 9780005 | Method for evaluating quality of oxide semiconductor thin film and laminated body having protective film on surface of oxide semiconductor thin film, and method for managing quality of oxide semiconductor thin film | Kazushi Hayashi, Toshihiro Kugimiya, Mototaka Ochi | 2017-10-03 |