Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793673 | Semiconductor inspection and metrology system using laser pulse multiplier | Yung-Ho Alex Chuang, J. Joseph Armstrong, Justin Dianhuan Liou, David L. Brown | 2017-10-17 |
| 9748729 | 183NM laser and inspection system | Yung-Ho Alex Chuang, J. Joseph Armstrong, Yujun Deng, John Fielden, Jidong Zhang | 2017-08-29 |
| 9608399 | 193 nm laser and an inspection system using a 193 nm laser | Yung-Ho Alex Chuang, J. Joseph Armstrong, Justin Dianhuan Liou, John Fielden | 2017-03-28 |