Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810619 | Method and system for simultaneous tilt and height control of a substrate surface in an inspection system | Zhongping Cai, Jingyi Xiong, Alexander Slobodov, Paul Doyle, Anatoly Romanovsky | 2017-11-07 |