Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772566 | Mask alignment mark, photomask, exposure apparatus, exposure method, and manufacturing method of device | Nobuhiro Komine | 2017-09-26 |
KT
Kazuo Tawarayama
Overall (2017): #352,334 of 506,227Top 70%
1
Patents 2017