Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711386 | Electrostatic chuck for high temperature process applications | Michael S. Cox | 2017-07-18 |
| 9649592 | Plasma abatement of compounds containing heavy atoms | Michael S. Cox, Monique McIntosh, Colin John Dickinson, Paul Fisher, Yutaka Tanaka | 2017-05-16 |
| 9571534 | Virtual meeting video sharing | Jianzhong Ding, Haitao Xin, Guangbing Liu, Hailei Sheng | 2017-02-14 |