Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831626 | Broadband light source and optical inspector having the same | Sung Yoon Ryu, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun, Seong Jin YUN | 2017-11-28 |
| 9733178 | Spectral ellipsometry measurement and data analysis device and related systems and methods | Sung Yoon Ryu, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun | 2017-08-15 |
| 9678020 | Apparatus and method for inspection of substrate defect | Joon-Seo Song, Ji-Young Shin, Seong Jin YUN, Yu-Sin Yang, Sang-Kil Lee +1 more | 2017-06-13 |