Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9708724 | Anode unit and plating apparatus having such anode unit | Junichiro Tsujino, Yusuke Tamari, Mitsutoshi Yahagi, Akira Owatari | 2017-07-18 |
| 9556533 | Substrate processing apparatus and substrate processing method | Keiichi Kurashina | 2017-01-31 |