Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824909 | Chuck, in particular for use in a mask aligner | Thomas Huelsmann, Katrin SCHINDLER | 2017-11-21 |
| 9568154 | Apparatus, method and system for a modular light-emitting diode circuit assembly | — | 2017-02-14 |