Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824909 | Chuck, in particular for use in a mask aligner | Sven Hansen, Thomas Huelsmann | 2017-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824909 | Chuck, in particular for use in a mask aligner | Sven Hansen, Thomas Huelsmann | 2017-11-21 |