Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837272 | Methods of manufacturing semiconductor devices | Su-Min Park, Su Min Kim, Hyo-Jin Yun, Hyun-Woo Kim, Kyoung-seon Kim +2 more | 2017-12-05 |
| 9773672 | Method of forming micropatterns | Su Min Kim, Hyun-Woo Kim, Hyo-Jin Yun, Kyoung-seon Kim, Hai-sub Na +1 more | 2017-09-26 |
| 9570304 | Method of forming fine patterns in an anti-reflection layer for use as a patterning hard mask | Min Ju Park, Haisub Na, Hyojin Yun, Kyoungseon Kim, Su Min Kim +2 more | 2017-02-14 |