Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9613846 | Pad design for electrostatic chuck surface | Govinda Raj, Cheng-Hsiung Tsai, Robert T. Hirahara, Kadthala Ramaya Narendrnath, Manjunatha Koppa | 2017-04-04 |
RM
Ross Marshall
Overall (2017): #262,444 of 506,227Top 55%
1
Patents 2017