Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831063 | Ion implantation compositions, systems, and methods | Oleg Byl, Joseph D. Sweeney, Ying Tang | 2017-11-28 |
| 9812291 | Alternate materials and mixtures to minimize phosphorus buildup in implant applications | — | 2017-11-07 |
| 9754786 | Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system | Robert Kaim, Joseph D. Sweeney, Anthony M. Avila | 2017-09-05 |
| 9685304 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Joseph D. Sweeney, Oleg Byl, Sharad N. Yedave, Edward E. Jones +3 more | 2017-06-20 |