Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9817229 | Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method | — | 2017-11-14 |
| 9678332 | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method | — | 2017-06-13 |
| 9599905 | Illumination optical system, exposure apparatus, device production method, and light polarization unit | Hirohisa Tanaka, Kinya Kato, Takashi Mori | 2017-03-21 |