Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9599905 | Illumination optical system, exposure apparatus, device production method, and light polarization unit | Osamu Tanitsu, Hirohisa Tanaka, Takashi Mori | 2017-03-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9599905 | Illumination optical system, exposure apparatus, device production method, and light polarization unit | Osamu Tanitsu, Hirohisa Tanaka, Takashi Mori | 2017-03-21 |