Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831128 | Method of processing a substrate | Hiroshi Morikazu, Karl Heinz Priewasser | 2017-11-28 |
| 9721809 | Method of forming gettering layer | Hiroshi Morikazu | 2017-08-01 |
| 9576835 | Workpiece processing method | Frank Wei, Hiroshi Morikazu | 2017-02-21 |