Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9732934 | Illumination device for optimizing polarization in an illumination pupil | Daniel Gene Smith | 2017-08-15 |
| 9658537 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2017-05-23 |