Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852890 | Frequency tuning for pulsed radio frequency plasma processing | Myeong Yeol Choi | 2017-12-26 |
| 9711331 | Frequency tuning for pulsed radio frequency plasma processing | Myeong Yeol Choi | 2017-07-18 |
| 9544987 | Frequency tuning for pulsed radio frequency plasma processing | Myeong Yeol Choi | 2017-01-10 |