Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852890 | Frequency tuning for pulsed radio frequency plasma processing | Michael Mueller | 2017-12-26 |
| 9748076 | Apparatus for frequency tuning in a RF generator | Denis Shaw, Mike Mueller, Jeffrey Roberg, Steve Jordan | 2017-08-29 |
| 9711331 | Frequency tuning for pulsed radio frequency plasma processing | Michael Mueller | 2017-07-18 |
| 9544987 | Frequency tuning for pulsed radio frequency plasma processing | Michael Mueller | 2017-01-10 |