Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685358 | Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus | Ante Plazonic, Vijay Kumar Badam | 2017-06-20 |
| 9536770 | Method and apparatus for liquid treatment of wafer shaped articles | Karl-Heinz Hohenwarter, Dieter Spitaler, Gerald Anton | 2017-01-03 |