Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685358 | Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus | Vijay Kumar Badam, Michael Brugger | 2017-06-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685358 | Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus | Vijay Kumar Badam, Michael Brugger | 2017-06-20 |