Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837265 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2017-12-05 |
| 9653327 | Methods of removing a material layer from a substrate using water vapor treatment | Kwangduk Douglas Lee, Sudha Rathi, Chiu Chan, Bok Heon Kim | 2017-05-16 |