Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773637 | Plasma ion source and charged particle beam apparatus | Hiroshi Oba, Yasuhiko Sugiyama | 2017-09-26 |
| 9773646 | Plasma ion source and charged particle beam apparatus | Hiroshi Oba, Yasuhiko Sugiyama | 2017-09-26 |