Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773643 | Apparatus and method for deposition and etch in gap fill | Akhil Singhal, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2017-09-26 |
MF
Martin E. Freeborn
Overall (2017): #326,036 of 506,227Top 65%
1
Patents 2017