Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773643 | Apparatus and method for deposition and etch in gap fill | Patrick A. Van Cleemput, Martin E. Freeborn, Bart J. van Schravendijk | 2017-09-26 |
| 9617637 | Systems and methods for improving deposition rate uniformity and reducing defects in substrate processing systems | Arul N. Dhas, Brannon Kelley, Jaswinder Guiliani | 2017-04-11 |