Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620377 | Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch | Eric A. Hudson, Mark Wilcoxson, Hyung Joo Shin | 2017-04-11 |
| 9543148 | Mask shrink layer for high aspect ratio dielectric etch | Eric A. Hudson, Mark Wilcoxson, Hyunjong Shim, Merrett Wong | 2017-01-10 |