Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748366 | Etching oxide-nitride stacks using C4F6H2 | Kenny L. Doan, Li Ling, Jairaj Payyapilly, Srinivas D. Nemani, Daisuke Shimizu +1 more | 2017-08-29 |
| 9589832 | Maintaining mask integrity to form openings in wafers | Daisuke Shimizu | 2017-03-07 |