Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748366 | Etching oxide-nitride stacks using C4F6H2 | Jong Mun Kim, Li Ling, Jairaj Payyapilly, Srinivas D. Nemani, Daisuke Shimizu +1 more | 2017-08-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748366 | Etching oxide-nitride stacks using C4F6H2 | Jong Mun Kim, Li Ling, Jairaj Payyapilly, Srinivas D. Nemani, Daisuke Shimizu +1 more | 2017-08-29 |