Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852889 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2017-12-26 |
| 9761414 | Uniformity control circuit for use within an impedance matching circuit | Alexei Marakhtanov, Felix Kozakevich, Kenneth Lucchesi | 2017-09-12 |
| 9673058 | Method for etching features in dielectric layers | Scott Briggs, Eric A. Hudson, Leonid Belau, Mark Wilcoxson | 2017-06-06 |
| 9595424 | Impedance matching circuit for operation with a kilohertz RF generator and a megahertz RF generator to control plasma processes | Alexei Marakhtanov, Felix Kozakevich, Brett Jacobs | 2017-03-14 |
| 9564285 | Hybrid feature etching and bevel etching systems | Andreas Fischer | 2017-02-07 |
| 9536749 | Ion energy control by RF pulse shape | Alexei Marakhtanov, Zhigang Chen | 2017-01-03 |