Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9646127 | 3D resist profile aware etch-bias model | Hua Song, Cheng-En Wu | 2017-05-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9646127 | 3D resist profile aware etch-bias model | Hua Song, Cheng-En Wu | 2017-05-09 |