Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9646127 | 3D resist profile aware etch-bias model | Hua Song, James P. Shiely | 2017-05-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9646127 | 3D resist profile aware etch-bias model | Hua Song, James P. Shiely | 2017-05-09 |