Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9617637 | Systems and methods for improving deposition rate uniformity and reducing defects in substrate processing systems | Arul N. Dhas, Brannon Kelley, Akhil Singhal | 2017-04-11 |