Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852924 | Line edge roughness improvement with sidewall sputtering | Zhongkui Tan, Yiting Zhang, Qian Fu, Qing Xu | 2017-12-26 |
| 9741563 | Hybrid stair-step etch | Indeog Bae, Sung Jin Jung, Ce Qin, Qian Fu, Yoko Yamaguchi | 2017-08-22 |