HO

HIROFUMI OTAKI

EB Ebara: 1 patents #73 of 168Top 45%
Overall (2017): #401,208 of 506,227Top 80%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9847263 Substrate processing method including reprocessing rejected wafers Tsuneo Torikoshi 2017-12-19